New multilayer coating system for wafers up to 300 mm dia. by magnetron sputtering

The scia Multi 300, the new magnetron sputter system by German thin film equipment manufacturer scia Systems, produces precise multilayer-stacks on 300 mm wafers. The Helmholtz-Zentrum Dresden-Rossendorf (HZDR) uses the system already to produce flexible and printable magnetic field sensors. In the volume production of semiconductor components, besides many quality requirements, the yield of usable […]

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